三軸加速度傳感器的主要類型有壓阻式、壓電式、靜電電容式三種，將測量對象的加速度轉換為傳感器單元的電阻/電壓/電容的變化，利用轉換電路將傳感器單元的變化值轉換為電壓值，根據信號進行放大和濾波處理，得到模擬量，將模擬量處理為合適的穩定的輸出信號，此時輸出的信號為電壓值，最后通過ADC轉換器（模數轉換器），轉換為數字信號。 三軸(zhou)加速度(du)(du)傳(chuan)感(gan)器的(de)主要感(gan)應(ying)(ying)方式(shi)是測(ce)量(liang)電(dian)(dian)(dian)(dian)(dian)阻值、靜電(dian)(dian)(dian)(dian)(dian)電(dian)(dian)(dian)(dian)(dian)容(rong)值、應(ying)(ying)力、應(ying)(ying)變(bian)(bian)、位移等(deng)微小物理(li)量(liang)的(de)變(bian)(bian)化(hua)，并用電(dian)(dian)(dian)(dian)(dian)壓信(xin)號(hao)表現(xian)這(zhe)些變(bian)(bian)化(hua)量(liang)。 是用于將加速度(du)(du)這(zhe)一(yi)物理(li)信(xin)號(hao)轉換(huan)為容(rong)易測(ce)量(liang)的(de)電(dian)(dian)(dian)(dian)(dian)信(xin)號(hao)的(de)測(ce)試儀器。 差容(rong)式(shi)力平(ping)衡加速度(du)(du)傳(chuan)感(gan)器將測(ce)量(liang)的(de)加速度(du)(du)轉換(huan)為電(dian)(dian)(dian)(dian)(dian)容(rong)器的(de)電(dian)(dian)(dian)(dian)(dian)容(rong)變(bian)(bian)化(hua)。 實現(xian)這(zhe)種功(gong)能的(de)方法有可(ke)變(bian)(bian)間隙(xi)、可(ke)變(bian)(bian)面積、可(ke)變(bian)(bian)介(jie)電(dian)(dian)(dian)(dian)(dian)常數(shu)3種，差動(dong)(dong)式(shi)力平(ping)衡加速度(du)(du)傳(chuan)感(gan)器利用可(ke)變(bian)(bian)間隙(xi)，且采用差動(dong)(dong)式(shi)結(jie)構，結(jie)構簡單，動(dong)(dong)態響應(ying)(ying)好，可(ke)進行(xing)無接觸(chu)式(shi)測(ce)量(liang)，靈敏度(du)(du)高，分辨率強由(you)于自身電(dian)(dian)(dian)(dian)(dian)容(rong)一(yi)般(ban)很小，幾pF到(dao)幾百pF，其電(dian)(dian)(dian)(dian)(dian)容(rong)達到(dao)幾米的(de)近年來，集成(cheng)電(dian)(dian)(dian)(dian)(dian)路(lu)得(de)到(dao)了(le)廣泛應(ying)(ying)用，使(shi)電(dian)(dian)(dian)(dian)(dian)子電(dian)(dian)(dian)(dian)(dian)路(lu)與傳(chuan)感(gan)器極板緊密(mi)接觸(chu)，逐(zhu)漸克服了(le)寄生電(dian)(dian)(dian)(dian)(dian)容(rong)、非線(xian)性等(deng)缺點。
搭載在(zai)壓(ya)縮(suo)機上的三軸加(jia)速度傳(chuan)感器(qi)是由滾動(dong)(dong)軸承支撐的轉子，其振動(dong)(dong)傳(chuan)遞(di)到軸承蓋，安裝在(zai)軸承蓋上的振動(dong)(dong)速度傳(chuan)感器(qi)利(li)用內部的運動(dong)(dong)線(xian)圈切斷磁力線(xian)輸出(chu)電壓(ya)，將信(xin)號(hao)發送到監(jian)視器(qi)，測(ce)試機械故障并(bing)報警。
